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RGB Interferometry for Optical Metrology
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Book Description

This Spotlight discusses the theoretical and experimental aspects of RGB interferometry. It also focuses on various advanced RGB interferometers and their applications for 3-D surface profiling, deformation measurements, non-destructive testing (NDT), refractive index profiling of biological cells/tissues, etc. RGB interferometry is a fast, simple, and cost-effective tool for optical metrology and imaging applications.

Book Details

Date Published: 11 December 2019
Pages: 51
ISBN: 9781510634350
Volume: SL55

Table of Contents
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1 Introduction

2 RGB Interferometry of Smooth Surfaces: Theoretical Background
2.1 Interference fringe equations
2.2 Interferogram analysis techniques
2.3 Temporal phase-shifting technique
2.4 Measurement of step-height
     2.4.1 Effective-wavelength method
     2.4.2 Fringe-order method with three single-wavelength phases

3 RGB Interferometry of Rough Surfaces: Theoretical Background
3.1 Single-wavelength speckle techniques
3.2 Measurement of deformation
3.3 Measurement of shape and deformation simultaneously

4 Sensors for RGB Interferometry: Bayer 1CCD and Prism-Based 3CCD Sensors

5 RGB Interferometry Systems and Their Applications
5.1 Surface profiling of continuous surfaces
5.2 Surface profiling of discontinuous surfaces
     5.2.1 RGB interferometry with white light and Bayer 1CCD sensor
     5.2.2 RGB laser interferometry with a 3CCD sensor
     5.2.3 RGB interferometry with pulsed LED illumination
     5.2.4 RGB laser interferometry with polarization-masked Bayer sensor
5.3 Surface profiling of biological tissues
     5.3.1 Imaging red blood cells
     5.3.2 Imaging of fish cornea
     5.3.3 Imaging of E. coli bacteria
     5.3.4 Imaging RBCs with spectrally resolved laser interferometry
5.4 Simultaneous measurement of deformation and shape on rough surfaces
5.5 Surface profiling of smooth and rough surfaces simultaneously
5.6 Measurement of large defects for NDT applications

6 Color Cross-Talk and Its Influence in RGB Interferometry

7 Conclusions

Preface

Interferometry has been widely used for optical metrology because of its precision, reliability, and versatility. However, it is challenging to quantify large discontinuities and large deformations with a single wavelength. Multiple wavelengths can be used to solve problems associated with single-wavelength data. If a monochrome CCD is used as a sensor in the interferometer, the fringes are sequentially recorded with different wavelengths one after another, making the process time-consuming and cumbersome. Red-green-blue (RGB) interferometry solves these problems with a color CCD as the sensor, which allows simultaneous acquisition of all three (RGB) color fringe patterns, making data acquisition as simple as in the single-wavelength case. This Spotlight discusses the theoretical and experimental aspects of RGB interferometry. It also focuses on various advanced RGB interferometers and their applications for 3-D surface profiling, deformation measurements, non-destructive testing (NDT), refractive index profiling of biological cells/tissues, etc. RGB interferometry is a fast, simple, and cost-effective tool for optical metrology and imaging applications.

Paul Kumar Upputuri
Nandigana Krishna Mohan
Mahendra Prasad Kothiyal
December 2019


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