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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
21 - 25 February 2021
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Exhibit at SPIE Advanced Lithography 2021

Exhibit at SPIE Advanced Lithography 2020

Exhibit at SPIE Advanced Lithography in February 2021, the largest gathering of lithography experts in the world. For more than 40 years, SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications.

 • Reach 2,100 lithography experts
 • Two exhibition days that offer opportunities for face-to-face interaction with potential customers
 • 58 exhibiting companies in 2020

For information on exhibiting, download the prospectus or contact Sales: +1 360-676-3290 or spiesales@spie.org

2021 Exhibitor Contract  | Online

2021 Exhibitor and Sponsor Prospectus (PDF)

Become a 2021 Sponsor

Advertising Options for 2021

2021 Exhibitor List - Coming Soon

2021 Exhibition Floor Plan - Coming Soon

2021 Exhibitor Logistics

2021 Exhibition space pricing

SPIE Corporate Member rates reflects a 15% discount. Learn more

Space type Non Member Fee Corp Member Fee
6 ft. Table $3.225 $2,741.25
10 ft. x 10 ft. Booth* $4,540 $3,859
Island** $56.71 per sq. ft. $48.20 per sq. ft.

*Optional corner is $550 per corner (applies to booths only)
**Increments of 10ft., 400 sq. ft. minimum

Connect with this qualified audience

Who is at SPIE Advanced Lithography

  • Application and product developers
  • Process engineers
  • Basic and applied researchers
  • Lithography technicians
  • Failure analysis/materials characterization engineers
  • Mico/nanoelectronic engineers
  • Chip designers
  • Mask manufacturers
  • Resist chemists

Featured technologies at the exhibition

  • Lithography: immersion, double patterning, e-beam, EUV, optical/laser, RET
  • Metrology, inspection, OPC, and process control
  • Design and manufacturing software
  • Materials and chemicals
  • Imaging equipment
  • Lasers
  • Resist materials and processing
  • Nano-imprint
  • IC and chip fabrication
  • Nanoscale imaging
  • Etch Technology for nanopatterning

Why companies return year after year

  • 82% rate the quality of attendees as "good" or "excellent"
  • 80% of those surveyed would be "very willing" to recommend SPIE Advanced Lithography to an associate

Source: exhibitor survey

Contact SPIE Sales

Teresa Roles-Meier
Teresa Roles-Meier
1 360 685 5445


Learn more about exhibiting at SPIE Advanced Lithography